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公开(公告)号：US20160181458A1
公开(公告)日：2016-06-23
申请号：US14587053
申请日：2014-12-31
Applicant: Massachusetts Institute of Technology
Inventor： K. Alexander McIntosh , David C. Chapman , Joseph P. Donnelly , Douglas C. Oakley , Antonio Napoleone , Erik K. Duerr , Simon Verghese , Richard D. Younger
IPC: H01L31/107 , H01L31/0216 , H01L31/0352 , H01L31/0304 , H01L25/16 , H01L31/02 , H01L27/144 , H01L31/0232
CPC classification number: H01L31/107 , H01L25/167 , H01L27/1446 , H01L31/02005 , H01L31/02162 , H01L31/02327 , H01L31/03046 , H01L31/0352 , H01L2924/0002 , H01L2924/00
Abstract: An avalanche photodiode detector is provided with a substrate including an array of avalanche photodiodes. An optical interface surface of the substrate is arranged for accepting external input radiation. There is provided at least one cross-talk blocking layer of material including apertures positioned to allow external input radiation to reach photodiodes and including material regions positioned for attenuating radiation in the substrate that is produced by photodiodes in the array. Alternatively at least one cross-talk blocking layer of material is disposed on the optical interface surface of the substrate to allow external input radiation to reach photodiodes and attenuate radiation in the substrate that is produced by photodiodes in the array. At least one cross-talk filter layer of material can be disposed in the substrate adjacent to the photodiode structures, including a material that absorbs radiation in the substrate that is produced by photodiodes in the array.
Abstract translation: 雪崩光电二极管检测器设置有包括雪崩光电二极管阵列的衬底。 布置基板的光学界面以接收外部输入辐射。 提供了至少一个材料的串扰阻挡层，其包括定位成允许外部输入辐射到达光电二极管并且包括定位的衰减由阵列中的光电二极管产生的衬底中的辐射的材料区域的孔。 或者，材料的至少一个串扰阻挡层设置在衬底的光学接口表面上，以允许外部输入辐射到达光电二极管并且衰减由阵列中的光电二极管产生的衬底中的辐射。 至少一个材料的串扰滤波器层可以设置在与光电二极管结构相邻的衬底中，包括吸收由阵列中的光电二极管产生的衬底中的辐射的材料。
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公开(公告)号：US10649306B2
公开(公告)日：2020-05-12
申请号：US16284161
申请日：2019-02-25
Applicant: Massachusetts Institute of Technology
Inventor： Scott A. Skirlo , Cheryl Marie Sorace-Agaskar , Marin Soljacic , Simon Verghese , Jeffrey S. Herd , Paul William Juodawlkis , Yi Yang , Dirk Robert Englund , Mihika Prabhu
Abstract: An integrated optical beam steering device includes a planar dielectric lens that collimates beams from different inputs in different directions within the lens plane. It also includes an output coupler, such as a grating or photonic crystal, that guides the collimated beams in different directions out of the lens plane. A switch matrix controls which input port is illuminated and hence the in-plane propagation direction of the collimated beam. And a tunable light source changes the wavelength to control the angle at which the collimated beam leaves the plane of the substrate. The device is very efficient, in part because the input port (and thus in-plane propagation direction) can be changed by actuating only log2 N of the N switches in the switch matrix. It can also be much simpler, smaller, and cheaper because it needs fewer control lines than a conventional optical phased array with the same resolution.
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公开(公告)号：US11175562B2
公开(公告)日：2021-11-16
申请号：US16842048
申请日：2020-04-07
Applicant: Massachusetts Institute of Technology
Inventor： Scott A. Skirlo , Cheryl Marie Sorace-Agaskar , Marin Soljacic , Simon Verghese , Jeffrey S. Herd , Paul William Juodawlkis , Yi Yang , Dirk Englund , Mihika Prabhu
Abstract: An integrated optical beam steering device includes a planar dielectric lens that collimates beams from different inputs in different directions within the lens plane. It also includes an output coupler, such as a grating or photonic crystal, that guides the collimated beams in different directions out of the lens plane. A switch matrix controls which input port is illuminated and hence the in-plane propagation direction of the collimated beam. And a tunable light source changes the wavelength to control the angle at which the collimated beam leaves the plane of the substrate. The device is very efficient, in part because the input port (and thus in-plane propagation direction) can be changed by actuating only log2 N of the N switches in the switch matrix. It can also be much simpler, smaller, and cheaper because it needs fewer control lines than a conventional optical phased array with the same resolution.
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公开(公告)号：US10361334B2
公开(公告)日：2019-07-23
申请号：US14587053
申请日：2014-12-31
Applicant: Massachusetts Institute of Technology
Inventor： K. Alexander McIntosh , David C. Chapman , Joseph P. Donnelly , Douglas C. Oakley , Antonio Napoleone , Erik K. Duerr , Simon Verghese , Richard D. Younger
IPC: H01L31/107 , H01L27/144 , H01L31/0216 , H01L25/16 , H01L31/02 , H01L31/0232 , H01L31/0304 , H01L31/0352
Abstract: An avalanche photodiode detector is provided with a substrate including an array of avalanche photodiodes. An optical interface surface of the substrate is arranged for accepting external input radiation. There is provided at least one cross-talk blocking layer of material including apertures positioned to allow external input radiation to reach photodiodes and including material regions positioned for attenuating radiation in the substrate that is produced by photodiodes in the array. Alternatively at least one cross-talk blocking layer of material is disposed on the optical interface surface of the substrate to allow external input radiation to reach photodiodes and attenuate radiation in the substrate that is produced by photodiodes in the array. At least one cross-talk filter layer of material can be disposed in the substrate adjacent to the photodiode structures, including a material that absorbs radiation in the substrate that is produced by photodiodes in the array.
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