Invention Grant
- Patent Title: Pressure-type flow rate control device
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Application No.: US15034002Application Date: 2014-11-25
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Publication No.: US10372145B2Publication Date: 2019-08-06
- Inventor: Takashi Hirose , Toshihide Yoshida , Atsushi Matsumoto , Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Katsuyuki Sugita
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: Fujikin Incorporated
- Current Assignee: Fujikin Incorporated
- Current Assignee Address: JP Osaka
- Agency: Griffin and Szipl PC
- Priority: JP2013-252167 20131205
- International Application: PCT/JP2014/005885 WO 20141125
- International Announcement: WO2015/083343 WO 20150611
- Main IPC: F16K31/02
- IPC: F16K31/02 ; G05D7/06 ; F16K7/14 ; H01L21/67 ; F16K31/00

Abstract:
A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.
Public/Granted literature
- US20160349763A1 PRESSURE-TYPE FLOW RATE CONTROL DEVICE Public/Granted day:2016-12-01
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