Invention Grant
- Patent Title: Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof
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Application No.: US15764158Application Date: 2015-09-29
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Publication No.: US10373802B2Publication Date: 2019-08-06
- Inventor: Yu Yamazawa , Kazutoshi Kaji
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge PC
- International Application: PCT/JP2015/077411 WO 20150929
- International Announcement: WO2017/056170 WO 20170406
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/20 ; H01J37/244 ; H01J37/22 ; H01J37/26

Abstract:
An object of the present invention relates to high-resolution observation on a light field STEM, a dark field image STEM, and an EELS, at a low acceleration voltage.The present invention relates to controlling on incorporation angles of a STEM detector and an electron energy loss spectroscopy by changing the disposition of a sample with respect to an optical axis direction of a primary electron beam in a scanning transmission microscopy including an electron energy loss spectroscopy.According to the present invention, it is possible to easily control an optimum scattering angle in each of a light field STEM, a dark field STEM, and an EELS while suppressing occurrence of chromatic aberration accompanying the controlling on the incorporation angle.
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