Invention Grant
- Patent Title: Pulsed light waveform measurement method and waveform measurement device
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Application No.: US16088875Application Date: 2017-03-15
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Publication No.: US10378964B2Publication Date: 2019-08-13
- Inventor: Koji Takahashi , Haruyasu Ito , Koyo Watanabe
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2016-067866 20160330
- International Application: PCT/JP2017/010477 WO 20170315
- International Announcement: WO2017/169800 WO 20171005
- Main IPC: G01J9/02
- IPC: G01J9/02 ; G01J11/00 ; G01J3/02 ; G02F1/137 ; G01J3/447

Abstract:
In a waveform measurement method, first, initial pulsed light is spatially dispersed for respective wavelengths. Next, the initial pulsed light is input to a polarization dependent type SLM in a state where a polarization plane is inclined with respect to a modulation axis direction, and a phase spectrum of a first polarization component of the initial pulsed light along the modulation axis direction is modulated, to cause a time difference between first pulsed light Lp1 including the first polarization component and second pulsed light Lp2 including a second polarization component orthogonal to the first polarization component. After combining the wavelength components, an object is irradiated with the pulsed light Lp1 and the pulsed light Lp2, and light generated in the object is detected. The above detection operation is performed while changing the time difference, and a temporal waveform of the pulsed light Lp1 is obtained.
Public/Granted literature
- US20190128741A1 PULSED LIGHT WAVEFORM MEASUREMENT METHOD AND WAVEFORM MEASUREMENT DEVICE Public/Granted day:2019-05-02
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