Invention Grant
- Patent Title: Substrate transport
-
Application No.: US14161039Application Date: 2014-01-22
-
Publication No.: US10395959B2Publication Date: 2019-08-27
- Inventor: Daniel Babbs , Robert T. Caveney , Robert C. May , Krysztof A. Majczak
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673 ; H01L21/67

Abstract:
A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.
Public/Granted literature
- US20140202921A1 SUBSTRATE TRANSPORT Public/Granted day:2014-07-24
Information query
IPC分类: