Invention Grant
- Patent Title: Method and apparatus for neutral beam processing based on gas cluster ion beam technology
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Application No.: US14496412Application Date: 2014-09-25
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Publication No.: US10409155B2Publication Date: 2019-09-10
- Inventor: Sean R. Kirkpatrick , Allen R. Kirkpatrick
- Applicant: Exogenesis Corporation
- Applicant Address: US MA Billerica
- Assignee: Exogensis Corporation
- Current Assignee: Exogensis Corporation
- Current Assignee Address: US MA Billerica
- Agency: Burns & Levinson, LLP
- Agent Jerry Cohen; David William Gomes
- Main IPC: H01J37/05
- IPC: H01J37/05 ; G03F1/80 ; H01J37/317 ; H01J37/147 ; H05H3/02 ; G03F1/82 ; H01L21/02 ; H01L21/265 ; H01L21/311 ; B24B37/04 ; H01L29/36
Abstract:
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.
Public/Granted literature
- US20150213996A1 METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY Public/Granted day:2015-07-30
Information query
