Invention Grant
- Patent Title: Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic
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Application No.: US15667281Application Date: 2017-08-02
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Publication No.: US10410900B2Publication Date: 2019-09-10
- Inventor: Shih-Ying Huang , Steven E. Babayan , Phillip Criminale , Stephen Prouty , Anthony Huang
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H05K3/12
- IPC: H05K3/12 ; B41F15/42 ; H01L21/683 ; H01L21/687 ; H01L21/67 ; H05B3/28 ; H05K1/02 ; H05K1/16 ; H05K1/18 ; H05K3/00 ; H05K1/03
Abstract:
Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.
Public/Granted literature
- US20180040498A1 PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATION MATERIALS ON GREEN SHEET CERAMIC Public/Granted day:2018-02-08
Information query
