公开(公告)号：US20190273008A1

公开(公告)日：2019-09-05

申请号：US16414642

申请日：2019-05-16

Applicant: Applied Materials, Inc.

Inventor： Shih-Ying Huang ,  Steven E. Babayan ,  Phillip Criminale ,  Stephen Prouty ,  Anthony Huang

IPC: H01L21/683 ,  H05K1/16 ,  H05K3/12 ,  H05K3/00 ,  H05K1/02 ,  H05K1/18 ,  H01L21/67 ,  B41F15/42 ,  H01L21/687 ,  H05B3/28

Abstract: Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

公开(公告)号：US20180040498A1

公开(公告)日：2018-02-08

申请号：US15667281

申请日：2017-08-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Shih-Ying Huang ,  Steven E. Babayan ,  Phillip Criminale ,  Stephen Prouty ,  Anthony Huang

IPC: H01L21/683 ,  H05K3/00 ,  H05B3/28 ,  H05K1/02 ,  H05K1/16 ,  H05K1/18 ,  H05K3/12 ,  H01L21/67

CPC classification number: H01L21/6833 ,  B41F15/423 ,  B41P2200/40 ,  H01L21/67103 ,  H01L21/6831 ,  H01L21/68785 ,  H05B3/283 ,  H05B2203/017 ,  H05K1/0201 ,  H05K1/0212 ,  H05K1/0306 ,  H05K1/165 ,  H05K1/167 ,  H05K1/181 ,  H05K3/0097 ,  H05K3/1233 ,  H05K3/1291 ,  H05K2203/0139 ,  H05K2203/162 ,  H05K2203/163 ,  H05K2203/166

Abstract: Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

公开(公告)号：US10410900B2

公开(公告)日：2019-09-10

申请号：US15667281

申请日：2017-08-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Shih-Ying Huang ,  Steven E. Babayan ,  Phillip Criminale ,  Stephen Prouty ,  Anthony Huang

IPC: H05K3/12 ,  B41F15/42 ,  H01L21/683 ,  H01L21/687 ,  H01L21/67 ,  H05B3/28 ,  H05K1/02 ,  H05K1/16 ,  H05K1/18 ,  H05K3/00 ,  H05K1/03

Abstract: Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.