Invention Grant
- Patent Title: Electrical contacts for magnetoresistive random access memory devices
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Application No.: US15767127Application Date: 2015-11-23
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Publication No.: US10411068B2Publication Date: 2019-09-10
- Inventor: Christopher J. Wiegand , Oleg Golonzka , Kaan Oguz , Kevin P. O'Brien , Tofizur Rahman , Brian S. Doyle , Tahir Ghani , Mark L. Doczy
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Patent Capital Group
- International Application: PCT/US2015/062078 WO 20151123
- International Announcement: WO2017/091189 WO 20170601
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L27/22 ; H01L43/02 ; H01L43/08

Abstract:
Disclosed herein are electrical contacts for magnetoresistive random access memory (MRAM) devices and related memory structures, devices, and methods. For example, and electrical contact for an MRAM device may include: a tantalum region; a barrier region formed of a first material; and a passivation region formed of a second material and disposed between the tantalum region and the barrier region, wherein the second material includes tantalum nitride and is different from the first material.
Public/Granted literature
- US20190027536A1 ELECTRICAL CONTACTS FOR MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICES Public/Granted day:2019-01-24
Information query
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