Invention Grant
- Patent Title: Method and structure for forming silicon germanium FinFET
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Application No.: US15861167Application Date: 2018-01-03
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Publication No.: US10411094B2Publication Date: 2019-09-10
- Inventor: Peng Xu , Kangguo Cheng , Juntao Li , Heng Wu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/66 ; H01L29/06 ; H01L21/02 ; H01L21/308 ; H01L29/165 ; H01L21/762 ; H01L29/78 ; H01L21/3065

Abstract:
A method of a forming a plurality of semiconductor fin structures that includes forming a sacrificial gate structure on a hardmask overlying a channel region portion of the plurality of sacrificial fins of a first semiconductor material and forming source and drain regions on opposing sides of the channel region. The sacrificial gate structure and the sacrificial fin structure are removed. A second semiconductor material is formed in an opening provided by removing the sacrificial gate structure and the sacrificial fin structure. The second semiconductor material is etched selective to the hardmask to provide a plurality of second semiconductor material fin structures. A function gate structure is formed on the channel region.
Public/Granted literature
- US20190206999A1 METHOD AND STRUCTURE FOR FORMING SILICON GERMANIUM FINFET Public/Granted day:2019-07-04
Information query
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