Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus
-
Application No.: US15895521Application Date: 2018-02-13
-
Publication No.: US10420198B2Publication Date: 2019-09-17
- Inventor: Hirokazu Hosoda , Toru Suzuki
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
The extreme ultraviolet light generating apparatus may include a chamber having a window through which a pulse laser beam enters, a target supply unit configured to output at least one target toward a predetermined region in the chamber, a target image capturing device configured to capture an image of the at least one target, a first actuator configured to move a focused area focused by the target image capturing device, and a controller configured to control the first actuator based on a signal from an external device.
Public/Granted literature
- US20180177036A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2018-06-21
Information query