Invention Grant
- Patent Title: MEMS sensor with high voltage switch
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Application No.: US15620619Application Date: 2017-06-12
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Publication No.: US10427930B2Publication Date: 2019-10-01
- Inventor: Matthew Thompson , Joseph Seeger
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/02 ; H01H1/00
Abstract:
A system and/or method for utilizing microelectromechanical systems (MEMS) switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).
Public/Granted literature
- US20180002162A1 MEMS SENSOR WITH HIGH VOLTAGE SWITCH Public/Granted day:2018-01-04
Information query
