Invention Grant
- Patent Title: Pump power consumption enhancement
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Application No.: US13692552Application Date: 2012-12-03
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Publication No.: US10428807B2Publication Date: 2019-10-01
- Inventor: Mariusch Gregor , Kenneth Le
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F04B7/00
- IPC: F04B7/00 ; F04B37/06 ; F04B37/14 ; F04B49/03 ; F04B49/06

Abstract:
Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.
Public/Granted literature
- US20130156610A1 PUMP POWER CONSUMPTION ENHANCEMENT Public/Granted day:2013-06-20
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