公开(公告)号：US09327252B2

公开(公告)日：2016-05-03

申请号：US13834625

申请日：2013-03-15

Applicant: APPLIED MATERIALS, INC.

Inventor： John W. Lane ,  Berrin Daran ,  Ramachandra Murthy Gunturi ,  Mariusch Gregor ,  Bhaswan Manjunath ,  Prashanth Vasudeva

IPC: B01F5/00 ,  B01F5/06 ,  B01F15/04 ,  B01F3/02

CPC classification number: B01F5/0077 ,  B01F3/028 ,  B01F5/0689 ,  B01F15/0429 ,  B01F2215/0096

Abstract: Apparatus and system for mixing gas comprising a first valve coupled to a first conduit controlling flow of a first gas, a second valve coupled to a second conduit controlling flow of a second gas, a controller controlling the valves, a base block with a first gas input coupled to the first conduit, a second gas input coupled to the second conduit and an output opening, a mixing chamber formed within the base block, wherein the mixing chamber is coupled to the first gas input and the second gas input to receive input gases, an inner block disposed within the mixing chamber, the inner block including a body with an inner volume and one or more perimeter holes formed through the body coupling the mixing chamber to the inner volume of the inner block; and a gas outlet configured to flow gas through the output opening of the base block.

Abstract translation: 用于混合气体的设备和系统，包括联接到控制第一气体流的第一导管的第一阀，连接到控制第二气体的流动的第二导管的第二阀，控制阀的控制器，具有第一气体的基座 输入，其耦合到第一导管，耦合到第二导管的第二气体输入口和输出开口，形成在基座块内的混合室，其中混合室与第一气体输入端相连，而第二气体输入端接收输入气体 设置在所述混合室内的内部块，所述内部块包括具有内部容积的主体和通过将所述混合室连接到所述内部块的内部容积的本体形成的一个或多个周边孔; 以及气体出口，其构造成使气体流过所述基座的输出开口。

公开(公告)号：US10428807B2

公开(公告)日：2019-10-01

申请号：US13692552

申请日：2012-12-03

Applicant: APPLIED MATERIALS, INC.

Inventor： Mariusch Gregor ,  Kenneth Le

IPC: F04B7/00 ,  F04B37/06 ,  F04B37/14 ,  F04B49/03 ,  F04B49/06

Abstract: Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.

公开(公告)号：US10108205B2

公开(公告)日：2018-10-23

申请号：US13971618

申请日：2013-08-20

Applicant: Applied Materials, Inc.

Inventor： Mariusch Gregor

IPC: G05D7/06

Abstract: A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves, and sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device monitors the plurality of valves for a flow condition requiring and adjustment. Upon detecting the flow condition, the processing device predicts the adjustment based on previous setpoints, and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the the predicted adjustment. The processing device then sends each of the plurality of updated setpoint commands to the corresponding one of the plurality of valves.

公开(公告)号：US20150005955A1

公开(公告)日：2015-01-01

申请号：US13971485

申请日：2013-08-20

Applicant: Applied Materials, Inc.

Inventor： Mariusch Gregor

IPC: G05D7/06

CPC classification number: G05D7/0664

Abstract: A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves. The processing device sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device receives feedback from each of the plurality of valves and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the corresponding feedback from each of the plurality of valves.

Abstract translation: 处理装置确定多个初始流量设定点命令，多个设定点命令中的每一个对应于多个阀中的一个。 处理装置将多个初始设定点命令中的每一个发送到多个阀中的对应的一个。 所述处理装置接收来自所述多个阀中的每一个的反馈，并且基于来自所述多个阀中的每一个的相应反馈确定多个更新的流量设定点命令，每个更新的流量设定点命令对应于所述多个阀中的一个。

公开(公告)号：US20150005956A1

公开(公告)日：2015-01-01

申请号：US13971618

申请日：2013-08-20

Applicant: Applied Materials, Inc.

Inventor： Mariusch Gregor

IPC: G05D7/06

CPC classification number: G05D7/0664

Abstract: A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves, and sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device monitors the plurality of valves for a flow condition requiring and adjustment. Upon detecting the flow condition, the processing device predicts the adjustment based on previous setpoints, and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the the predicted adjustment. The processing device then sends each of the plurality of updated setpoint commands to the corresponding one of the plurality of valves.

Abstract translation: 处理装置确定多个初始流量设定点命令，多个设定点命令中的每一个对应于多个阀中的一个，并且将多个初始设定点命令中的每一个发送到多个阀中的对应的一个阀。 处理装置监视多个阀以获得需要和调节的流动条件。 在检测到流量状况时，处理装置基于先前的设定点预测调整，并且基于预测的调整确定多个更新的流量设定点命令，每个更新的流量设定点命令对应于多个阀中的一个。 处理装置然后将多个更新的设定点命令中的每一个发送到多个阀中的对应的一个阀。

公开(公告)号：US10114389B2

公开(公告)日：2018-10-30

申请号：US13971485

申请日：2013-08-20

Applicant: Applied Materials, Inc.

Inventor： Mariusch Gregor

IPC: G05D7/06

Abstract: A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves. The processing device sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device receives feedback from each of the plurality of valves and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the corresponding feedback from each of the plurality of valves.