Invention Grant
- Patent Title: Charged particle beam device and sample holder
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Application No.: US16090452Application Date: 2016-04-13
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Publication No.: US10431417B2Publication Date: 2019-10-01
- Inventor: Akira Ikeuchi , Shigeru Haneda , Yoshinobu Hoshino
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- International Application: PCT/JP2016/061871 WO 20160413
- International Announcement: WO2017/179145 WO 20171019
- Main IPC: H01J37/20
- IPC: H01J37/20 ; G01N1/28 ; H01J37/22 ; H01J37/28

Abstract:
In order to provide a sample holder capable of easily searching for an observation field of view, the sample holder includes a sample placement portion including a first top surface on which a counterbore part is formed and a rotational axis for rotating the first top surface horizontally, the counterbore part being aligned by being mounted with a sample supporting member having a pattern for alignment, a sample base portion including an opening through which the sample placement portion is capable of moving vertically and a second top surface around the opening, and a sample cover portion which has conductivity and is pressed down toward a direction of the second top surface of the sample base portion, so that a top surface of the sample supporting member placed on the sample placement portion and the second top surface of the sample base portion are flush with each other.
Public/Granted literature
- US20190122853A1 Charged Particle Beam Device and Sample Holder Public/Granted day:2019-04-25
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