Invention Grant
- Patent Title: Method and station for measuring the contamination of a transport box for the atmospheric conveyance and storage of substrates
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Application No.: US15756375Application Date: 2016-08-29
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Publication No.: US10431484B2Publication Date: 2019-10-01
- Inventor: Olivier Le-Barillec , Julien Bounouar
- Applicant: PFEIFFER VACUUM
- Applicant Address: FR Annecy
- Assignee: PFEIFFER VACUUM
- Current Assignee: PFEIFFER VACUUM
- Current Assignee Address: FR Annecy
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1558115 20150902
- International Application: PCT/EP2016/070309 WO 20160829
- International Announcement: WO2017/037014 WO 20170309
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/67 ; G01N21/94 ; G01N33/00

Abstract:
A method for measuring contamination of a transport box for atmospheric conveyance and storage of substrates is provided, the method including: measuring a concentration of at least one gaseous species inside the transport box by a measurement device including at least one gas analyzer and a measurement line connecting the at least one gas analyzer to an interface, the interface placing the measurement line in communication with an internal atmosphere of the transport box; and supplying a gas flow containing water vapor to the measurement device. There is also provided a station for measuring contamination of a transport box for atmospheric conveyance and storage of substrates.
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