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    Sniffer probe and leak detector
    2.
    发明授权
    Sniffer probe and leak detector 有权

    公开(公告)号：US12066355B2

    公开(公告)日：2024-08-20

    申请号：US17636136

    申请日：2020-09-11

    Applicant: PFEIFFER VACUUM

    Inventor： Julien Coulomb ,  Cyrille Nomine

    IPC: G01M3/20 ,  G01M3/22

    CPC classification number: G01M3/205 ,  G01M3/223

    Abstract: A sniffer probe for a leak detector for monitoring the leaktightness of an object to be tested by tracer gas includes an end piece created in the form of a rigid tube, a housing, a connection member connecting the end piece to the housing, and a sampling duct to sample a gas at a first end of the end piece. The connection member includes a main body that is elastically deformable such that it can adopt a deformed position, making it possible for the end piece to pivot when acted upon by a force and to return to the initial rest position.

    VACUUM PUMP
    4.
    发明公开
    VACUUM PUMP 审中-公开

    公开(公告)号：US20240209855A1

    公开(公告)日：2024-06-27

    申请号：US18545789

    申请日：2023-12-19

    Applicant: Pfeiffer Vacuum Technology AG

    Inventor： Jonas BECKER ,  Jan HOFMANN ,  Sebastian LATTA ,  Heiko SCHAEFER ,  Maik SCHAEFER ,  Wolfgang SOEHNGEN

    IPC: F04C18/02 ,  F04C25/02 ,  F04C27/00

    CPC classification number: F04C18/0215 ,  F04C25/02 ,  F04C27/005 ,  F04C2220/10

    Abstract: A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at least sectionally, preferably continuously, obliquely to the axial direction.

    Method for setting an airborne molecular contamination measurement station, and measurement station
    5.
    发明授权
    Method for setting an airborne molecular contamination measurement station, and measurement station 有权

    公开(公告)号：US11953484B2

    公开(公告)日：2024-04-09

    申请号：US17425061

    申请日：2020-01-22

    Applicant: PFEIFFER VACUUM

    Inventor： Julien Bounouar ,  Olivier Le Barillec ,  Nicolas Chapel

    IPC: G01N33/00 ,  G01N1/22 ,  G01N1/26 ,  G05D7/06

    CPC classification number: G01N33/0075 ,  G01N1/22 ,  G01N1/26 ,  G05D7/0658

    Abstract: A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.

    VACUUM VALVE
    7.
    发明公开
    VACUUM VALVE 审中-公开

    公开(公告)号：US20230287993A1

    公开(公告)日：2023-09-14

    申请号：US17690470

    申请日：2022-03-09

    Applicant: PFEIFFER VACUUM TECHNOLOGY AG

    Inventor： Thomas R. HODAPP ,  Sean A. CASAROTTI ,  David W. CRONE

    IPC: F16K51/02 ,  F16K31/04 ,  F16K1/36 ,  F16K1/54

    CPC classification number: F16K51/02 ,  F16K31/047 ,  F16K1/36 ,  F16K1/54

    Abstract: A vacuum valve for high/ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and/or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.

    TURBOMOLECULAR VACUUM PUMP
    9.
    发明申请
    TURBOMOLECULAR VACUUM PUMP 有权

    公开(公告)号：US20220325718A1

    公开(公告)日：2022-10-13

    申请号：US17642543

    申请日：2020-09-24

    Applicant: PFEIFFER VACUUM

    Inventor： Hisanori KAMBARA ,  Nicolas VARENNES ,  Gilles RICHIER

    IPC: F04D19/04 ,  F04D29/70

    Abstract: A turbomolecular vacuum pump is provided, including: a stator; a rotor configured to rotate in the stator about an axis of rotation; and a regulation valve configured to modify an inlet conductance of the turbomolecular vacuum pump by axial displacement towards or away from a suction orifice of the turbomolecular vacuum pump, a face of the regulation valve facing the suction orifice having a hollow form.

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