Invention Grant
- Patent Title: Semiconductor device having a channel region patterned into a ridge by adjacent gate trenches
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Application No.: US15646152Application Date: 2017-07-11
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Publication No.: US10439030B2Publication Date: 2019-10-08
- Inventor: Andreas Meiser , Rolf Weis , Franz Hirler , Martin Vielemeyer , Markus Zundel , Peter Irsigler
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L29/92
- IPC: H01L29/92 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/40 ; H01L29/10 ; H01L27/12 ; H01L29/06

Abstract:
A semiconductor device includes a transistor in a semiconductor body having a first main surface. The transistor includes: a source contact electrically connected to a source region; a drain contact electrically connected to a drain region; a gate electrode at the channel region, the channel region and a drift zone disposed along a first direction between the source and drain regions, the first direction being parallel to the first main surface, the channel region patterned into a ridge by adjacent gate trenches formed in the first main surface, the adjacent gate trenches spaced apart in a second direction perpendicular to the first direction, a longitudinal axis of the ridge extending in the first direction and a longitudinal axis of the gate trenches extending in the first direction; and at least one of the source and drain contacts being adjacent to a second main surface opposite the first main surface.
Public/Granted literature
- US20170317176A1 Semiconductor Device Having a Channel Region Patterned into a Ridge by Adjacent Gate Trenches Public/Granted day:2017-11-02
Information query
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