Invention Grant
- Patent Title: System and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers
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Application No.: US13929964Application Date: 2013-06-28
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Publication No.: US10446390B2Publication Date: 2019-10-15
- Inventor: Yung-Tsun Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: B05D3/12
- IPC: B05D3/12 ; H01L21/02 ; H01L21/67 ; B05D1/00
Abstract:
A device and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers. The method includes dispensing liquid SOG through a dispenser nozzle, detecting liquid SOG outside of the dispenser nozzle, indicating the presence of liquid SOG in an abnormal length relative to the dispenser nozzle and adjusting a suck back (SB) valve to withdraw liquid SOG from the abnormal length.
Public/Granted literature
- US20150004720A1 SYSTEM AND METHOD FOR DISPENSING LIQUID SPIN-ON GLASS (SOG) ONTO SEMICONDUCTOR WAFERS Public/Granted day:2015-01-01
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