Invention Grant
- Patent Title: Imaging device for imaging an object and for imaging a structural unit in a particle beam apparatus
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Application No.: US15886269Application Date: 2018-02-01
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Publication No.: US10460904B2Publication Date: 2019-10-29
- Inventor: Wolfgang Berger
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102017201706 20170202
- Main IPC: H01J37/22
- IPC: H01J37/22 ; G01N15/14 ; G01N23/225 ; G01T1/16 ; H01J37/18 ; H01J37/244 ; H01J37/28

Abstract:
The system described herein relates to an imaging device for imaging an object in a particle beam apparatus and/or for imaging a structural unit of a particle beam apparatus, and to a particle beam apparatus having such an imaging device. The imaging device has an illumination unit having a first switching state and a second switching state for illuminating the object and/or the structural unit with illumination light, where, in the first switching state, the illumination light comprises only light of a first spectral range and where, in the second switching state, the illumination light comprises only light of a second spectral range. The imaging device has a control unit for switching the illumination unit into the first switching state or into the second switching state, and a camera unit for imaging the object and/or the structural unit.
Public/Granted literature
- US20180218877A1 IMAGING DEVICE FOR IMAGING AN OBJECT AND FOR IMAGING A STRUCTURAL UNIT IN A PARTICLE BEAM APPARATUS Public/Granted day:2018-08-02
Information query