A method to make a phosphorus modified zeolite can include providing a zeolite having at least one ten member ring, making an ion-exchange, steaming the zeolite, and introducing phosphorus on the zeolite. The zeolite can be mixed with one or more binders and shaping additives, and then shaped. A metal can be introduced, and the catalyst can be washed, calcined, and steamed in an equilibration step. The steaming can be at performed at a steam severity (X) of at least about 2. The steaming can be performed at a temperature above 625° C. The catalyst can be used in alcohol dehydration, olefin cracking, MTO processes, and alkylation of aromatics by alcohols with olefins and/or alcohols.