Invention Grant
- Patent Title: Treatment apparatus for treating a surface of a body
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Application No.: US13045437Application Date: 2011-03-10
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Publication No.: US10468277B2Publication Date: 2019-11-05
- Inventor: Reto Schoeb
- Applicant: Reto Schoeb
- Applicant Address: CH Zurich
- Assignee: Levitronix GmbH
- Current Assignee: Levitronix GmbH
- Current Assignee Address: CH Zurich
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: EP10158604 20100331
- Main IPC: H01L21/306
- IPC: H01L21/306 ; B05C13/02 ; H01L21/67

Abstract:
The invention relates to a treatment apparatus (1) for treating a surface (21) of a body (2) with a first treatment medium (31) and a second treatment medium (32). In this respect, the treatment apparatus (1) includes a holding device (5) rotatable about an axis of rotation (4) for receiving and holding the body (2) and a rotary drive (6) rotationally fixedly coupled to the rotatable holding device (5) as well as a supply device (7) for supplying the first treatment medium (31) and the second treatment medium (32) to the surface (21) of the body (2) held in the holding device (5). The treatment apparatus includes a collection container (8) having a separation element (80) which separation element (80) divides the collection container (8) into a first chamber (81) and into a second chamber (82) such that the first treatment medium (31) can be collected in the first chamber (81) and the second treatment medium (32) can be collected separately in the second chamber (82). In accordance with the invention, the collection container (8) includes a base chamber part (800) not movable with respect to the holding device (5) and the separation element (80) is movably arranged between a first position (A) and a second position (B) such that the first treatment medium (31) can be led off into the first chamber (81) in the first position (A) and the second treatment medium (32) can be led off into the second chamber (82) in the second position (B).
Public/Granted literature
- US20110240220A1 Treatment apparatus for treating a surface of a body Public/Granted day:2011-10-06
Information query
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