Invention Grant
- Patent Title: Mesas and implants in two-dimensional arrays
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Application No.: US15935080Application Date: 2018-03-26
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Publication No.: US10468437B2Publication Date: 2019-11-05
- Inventor: Wei Huang , Wei Zhang , Joshua Lund , Namwoong Paik
- Applicant: Sensors Unlimited, Inc.
- Applicant Address: US NJ Princeton
- Assignee: Sensors Unlimited, Inc.
- Current Assignee: Sensors Unlimited, Inc.
- Current Assignee Address: US NJ Princeton
- Agency: Locke Lord LLP
- Agent Scott D. Wofsy; Joshua L. Jones
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/144 ; H01L31/109 ; H01L31/0352 ; H01L31/0304 ; H01L31/0216 ; H01L31/18

Abstract:
A photodiode includes an absorption layer. A cap layer is disposed on a surface of the absorption layer. A pixel diffusion area within the cap layer extends beyond the surface of the absorption layer and into the absorption layer to receive a charge generated from photons therefrom. A mesa trench is defined through the cap layer surrounding the pixel diffusion area, wherein the mesa trench defines a floor at the surface of the absorption layer and opposed sidewalls extending away from the surface of the absorption layer. An implant is aligned with the mesa trench and extends from the floor of the mesa trench through the absorption layer surrounding a portion of the absorption layer proximate the pixel diffusion area.
Public/Granted literature
- US20190296058A1 MESAS AND IMPLANTS IN TWO-DIMENSIONAL ARRAYS Public/Granted day:2019-09-26
Information query
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