Methods of forming merged source/drain regions on integrated circuit products
Abstract:
A method of forming a merged source/drain region is disclosed that includes forming first and second VOCS structures above a semiconductor substrate, forming a recess in the substrate between the first and second VOCS structures and forming a P-type-doped semiconductor material in the recess. In this particular example, the method also includes removing a first substantially horizontally-oriented portion of the P-type-doped semiconductor material from within the recess while leaving a second substantially horizontally-oriented portion of the P-type-doped semiconductor material remaining in the recess and forming a substantially horizontally-oriented N-type-doped semiconductor material in the recess laterally adjacent the second substantially horizontally-oriented portion of the P-type-doped semiconductor material, wherein the substantially horizontally-oriented N-type-doped semiconductor material physically engages the second substantially horizontally-oriented portion of the P-type-doped semiconductor material along an interface within the merged source/drain region.
Information query
Patent Agency Ranking
0/0