Invention Grant
- Patent Title: Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device
-
Application No.: US15906039Application Date: 2018-02-27
-
Publication No.: US10483084B2Publication Date: 2019-11-19
- Inventor: Josef Biberger
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102017203553 20170304
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/22 ; H01J37/153 ; G01N23/2252 ; G01N23/2254 ; G01N1/06

Abstract:
The system described herein relates to an object preparation device for preparing an object in a particle beam apparatus. By way of example, the particle beam apparatus is an electron beam apparatus and/or an ion beam apparatus. The system described herein moreover relates to a particle beam apparatus having such an object preparation device and to a method for operating the particle beam apparatus. The object preparation device may have an object receptacle device for receiving the object, a cutting device and a cutting bevel for cutting the object, wherein the cutting bevel may be arranged at the cutting device. The cutting bevel may lay in a cutting plane. Further, an axis of rotation may lay in the cutting plane. The cutting bevel may be embodied to be rotatable about the axis of rotation.
Public/Granted literature
Information query