A droplet collection device may include a collecting container arranged on an outer wall surface side of a wall of a chamber and configured to communicate with the inside of the chamber through an opening provided at the wall of the chamber, a collision plate arranged in the collecting container and configured such that a droplet supplied from the opening to the collecting container is to collide with the collision plate, a shielding plate arranged on an opening side with respect to the collision plate and provided with a through-hole through which the droplet supplied to the collecting container passes and a wire rod bundle arranged in the through-hole of the shielding plate in a state that multiple wire rods are bundled.