Invention Grant
- Patent Title: Cross-flow reactor and method
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Application No.: US14645234Application Date: 2015-03-11
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Publication No.: US10529542B2Publication Date: 2020-01-07
- Inventor: Carl Louis White , Eric James Shero , Mohith Verghese
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holdings B.V.
- Current Assignee: ASM IP Holdings B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455 ; B08B7/00 ; C23C16/458

Abstract:
Gas-phase reactors and systems are disclosed. Exemplary reactors include a reaction chamber having a tapered height. Tapering the height of the reactor is thought to reduce a pressure drop along the flow of gasses through the reactor. Exemplary reactors can also include a spacer within a gap to control a flow of gas between a region and a reaction chamber.
Public/Granted literature
- US20160268102A1 CROSS-FLOW REACTOR AND METHOD Public/Granted day:2016-09-15
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