Invention Grant
- Patent Title: Extreme ultraviolet light generation device
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Application No.: US15888109Application Date: 2018-02-05
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Publication No.: US10531550B2Publication Date: 2020-01-07
- Inventor: Takayuki Yabu
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
An extreme ultraviolet light generation device may include: a chamber in which extreme ultraviolet light is generated from plasma generated by irradiating a target with laser light output by a laser device, in a generation region therein; a target supply unit configured to output the target as a droplet toward the generation region; a droplet detector configured to detect the droplet in a detection region; and a controller. The droplet detector may transmit, to the controller, a pass timing signal indicating a timing when the droplet passes through the detection region. The controller may include a noise compensation unit configured to compensate for noise of the pass timing signal caused by an electromagnetic wave from the plasma, and transmit a trigger signal that gives a trigger to output the laser light to the laser device based on the pass timing signal in which the noise is compensated for.
Public/Granted literature
- US20180173102A1 EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE Public/Granted day:2018-06-21
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