Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus
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Application No.: US15955031Application Date: 2018-04-17
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Publication No.: US10531551B2Publication Date: 2020-01-07
- Inventor: Takayuki Yabu , Yuichi Nishimura
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01S3/10

Abstract:
The extreme ultraviolet light generating apparatus includes a target supply unit to output a target, a driver laser to output a driver laser beam with which the target is irradiated, a guide laser to output a guide laser beam, a beam combiner to have optical paths of the driver laser beam and the guide laser beam substantially coincide with each other and output these beams, a first optical element including a first actuator to adjust an optical path of the driver laser beam to be incident on the beam combiner, a second optical element including a second actuator to adjust an optical path of the guide laser beam to be incident on the beam combiner, a sensor to detect the guide laser beam outputted from the beam combiner to output detected data, and a controller to receive the detected data, control the second actuator based on the detected data, and control the first actuator based on an amount of controlling of the second actuator.
Public/Granted literature
- US20180235064A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2018-08-16
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