Invention Grant
- Patent Title: Laser beam profiler unit and laser processing apparatus
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Application No.: US16111413Application Date: 2018-08-24
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Publication No.: US10532433B2Publication Date: 2020-01-14
- Inventor: Junichi Kuki , Joel Koerwer , Keinosuke Maeda
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2017-162558 20170825
- Main IPC: B23K26/70
- IPC: B23K26/70 ; G02B27/28 ; G01J1/42 ; B23K26/06 ; B23K26/073 ; G01J1/04

Abstract:
A laser beam profiler unit for measuring an intensity distribution of a laser beam oscillated from a laser oscillator includes a magnifying optical system for magnifying a spot diameter of the laser beam oscillated from the laser oscillator and focused by a condensing lens, a first transmission prism for attenuating the laser beam, a second transmission prism for further attenuating a laser beam reflected by the first transmission prism, an image capturing element for detecting the laser beam reflected by the second transmission prism, and an analyzer for analyzing an intensity distribution of a spot of the laser beam from data of the laser beam detected by the image capturing element.
Public/Granted literature
- US20190061063A1 LASER BEAM PROFILER UNIT AND LASER PROCESSING APPARATUS Public/Granted day:2019-02-28
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