Invention Grant
- Patent Title: Device with ion column and scanning electron microscope
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Application No.: US16133107Application Date: 2018-09-17
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Publication No.: US10535496B2Publication Date: 2020-01-14
- Inventor: Jaroslav Jiruse , Filip Lopour
- Applicant: TESCAN Brno, s.r.o.
- Applicant Address: CZ Brno
- Assignee: TESCAN Brno, s.r.o.
- Current Assignee: TESCAN Brno, s.r.o.
- Current Assignee Address: CZ Brno
- Agency: Hitaffer & Hitaffer, PLLC
- Agent Thedford I. Hitaffer
- Priority: CZ2017-566 20170920
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/20 ; H01J37/21 ; H01J37/28 ; H01J37/244
Abstract:
A device with an ion column and a scanning electron microscope comprises at least one column detector of signal electrons placed inside or on the ion column. Signal generated on the sample is detected on the column detector during landing of a broad beam generated by the scanning electron microscope on the sample surface.
Public/Granted literature
- US20190088445A1 Unknown Public/Granted day:2019-03-21
Information query
