Invention Grant
- Patent Title: Plasma diffuser method and apparatus
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Application No.: US15306147Application Date: 2015-04-22
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Publication No.: US10535500B2Publication Date: 2020-01-14
- Inventor: Filip Legein , Eva Rogge , Guy Feys
- Applicant: Europlasma NV
- Applicant Address: BE Oudenaarde
- Assignee: Europlasma NV
- Current Assignee: Europlasma NV
- Current Assignee Address: BE Oudenaarde
- Agent James Creighton Wray
- Priority: EP14165491 20140422
- International Application: PCT/EP2015/058728 WO 20150422
- International Announcement: WO2015/162183 WO 20151029
- Main IPC: C23C16/452
- IPC: C23C16/452 ; H01J37/32 ; D06M10/02 ; D06M10/10 ; D06M14/32 ; D06M15/277
Abstract:
A method is provided for at least partially preventing discolouration of a substrate by a plasma coating process, by diffusing a plasma prior to and/or during depositing of said plasma on said substrate to form a coating. Also provided is a plasma coating apparatus comprising a plasma diffuser for homogenizing a plasma density nearby a substrate to be coated.
Public/Granted literature
- US20170047201A1 Plasma Diffuser Public/Granted day:2017-02-16
Information query
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