公开(公告)号：US10535500B2

公开(公告)日：2020-01-14

申请号：US15306147

申请日：2015-04-22

Applicant: Europlasma NV

Inventor： Filip Legein ,  Eva Rogge ,  Guy Feys

IPC: C23C16/452 ,  H01J37/32 ,  D06M10/02 ,  D06M10/10 ,  D06M14/32 ,  D06M15/277

Abstract: A method is provided for at least partially preventing discolouration of a substrate by a plasma coating process, by diffusing a plasma prior to and/or during depositing of said plasma on said substrate to form a coating. Also provided is a plasma coating apparatus comprising a plasma diffuser for homogenizing a plasma density nearby a substrate to be coated.

公开(公告)号：US20170047201A1

公开(公告)日：2017-02-16

申请号：US15306147

申请日：2015-04-22

Applicant: Europlasma NV

Inventor： Filip Legein ,  Eva Rogge ,  Guy Feys

IPC: H01J37/32 ,  D06M15/277 ,  D06M14/32 ,  D06M10/02 ,  D06M10/10

Abstract: The present invention concerns a method for at least partially preventing discolouration of a substrate by a plasma coating process, by diffusing a plasma prior to and/or during depositing of said plasma on said substrate to form a coating. The present invention also concerns a plasma coating apparatus comprising a plasma diffuser for homogenizing a plasma density nearby a substrate to be coated.

Abstract translation: 本发明涉及一种通过在所述衬底上沉积所述等离子体之前和/或期间扩散等离子体以形成涂层来至少部分地防止通过等离子体涂覆方法使衬底变色的方法。 本发明还涉及一种等离子体涂覆装置，其包括用于使待涂覆的基底附近的等离子体密度均匀化的等离子体扩散器。