Invention Grant
- Patent Title: System and method for heat treatment of substrates
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Application No.: US15880935Application Date: 2018-01-26
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Publication No.: US10535538B2Publication Date: 2020-01-14
- Inventor: Gary Hillman
- Applicant: Gary Hillman
- Agency: The Belles Group, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/324 ; B05D3/02 ; F27D3/00 ; G03F7/20 ; F27D1/18 ; F27D5/00

Abstract:
A system and/or method for heat treatment of substrates. The system includes a housing that defines a heating chamber and a door assembly that encloses an opening of the heating chamber. The door assembly may be opened and closed. When opened, the door assembly defines a loading slot for loading substrates into and unloading substrates from the heating chamber. The door assembly is coupled to a first actuator and a control unit is coupled to the actuator to move the door assembly between a plurality of loading positions. The system may also include a loading assembly mounted to the door assembly to facilitate insertion and removal of substrates from the heating chamber.
Public/Granted literature
- US20180211854A1 SYSTEM AND METHOD FOR HEAT TREATMENT OF SUBSTRATES Public/Granted day:2018-07-26
Information query
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