Invention Grant
- Patent Title: Heat dissipation component for semiconductor element
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Application No.: US15508187Application Date: 2015-09-01
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Publication No.: US10539379B2Publication Date: 2020-01-21
- Inventor: Yosuke Ishihara , Takeshi Miyakawa , Kazunori Koyanagi
- Applicant: DENKA COMPANY LIMITED
- Applicant Address: JP Tokyo
- Assignee: DENKA COMPANY LIMITED
- Current Assignee: DENKA COMPANY LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-177850 20140902
- International Application: PCT/JP2015/074843 WO 20150901
- International Announcement: WO2016/035789 WO 20160310
- Main IPC: B22F7/02
- IPC: B22F7/02 ; F28F21/02 ; C22C26/00 ; C22C47/12 ; H01L23/373 ; C22C21/02 ; F28F21/08 ; H01L21/48 ; B22F7/06 ; C25D5/12 ; C22C49/06 ; C25D5/44 ; C23C18/32 ; C23C18/42

Abstract:
A heat dissipation component for a semiconductor element includes: a composite part containing 50-80 vol % diamond powder with the remainder having metal including aluminum, the diamond powder having a particle diameter volume distribution first peak at 5-25 μm and a second peak at 55-195 μm. A ratio between a volume distribution area at particle diameters of 1-35 μm and a volume distribution area at particle diameters of 45-205 μm is 1:9 to 4:6; surface layers on both composite part principal surfaces, each of the surface layers containing 80 vol % or more metal including aluminum and having a film thickness of 0.03-0.2 mm; and a crystalline Ni layer and an Au layer on at least one of the surface layers, the crystalline Ni layer having a film thickness of 0.5-6.5 μm, and the Au layer having a film thickness of 0.05 μm or larger.
Public/Granted literature
- US20170268834A1 HEAT DISSIPATION COMPONENT FOR SEMICONDUCTOR ELEMENT Public/Granted day:2017-09-21
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