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公开(公告)号:US10751912B2
公开(公告)日:2020-08-25
申请号:US15765931
申请日:2016-10-11
Applicant: DENKA COMPANY LIMITED
Inventor: Hiroaki Ota , Takeshi Miyakawa , Yosuke Ishihara
IPC: B22F7/02 , B28B19/00 , C22C26/00 , C22C21/00 , C04B41/88 , C04B41/00 , H01L21/48 , C04B41/51 , B22D21/00 , C22C1/10 , C22C21/04 , B22F7/04 , B28B11/24 , C09K5/14 , F28F21/08 , H01L23/373 , C22C21/02
Abstract: The present invention provides an aluminum-diamond composite which combines high thermal conductivity and a coefficient of thermal expansion close to a semiconductor element, and in which the difference between the thicknesses of both surfaces is reduced so as to be suitable for use as a heat sink etc. for a semiconductor element. Provided is a flat plate-shaped aluminum-diamond composite that has an aluminum-diamond composite part and a surface layer that coats both surfaces of the composite part and includes a metal that has aluminum as a principal component, wherein: the composite part is composed of a composite material that is composed of an aluminum or aluminum alloy matrix and diamond particles dispersed in said matrix; the composite material is composed of a diamond powder in which diamond particles having a particle size of 1-20 μm, inclusive, make up 10-40 vol % of the diamond particles and diamond particles having a particle size of 100-250 μm, inclusive, make up 50-80 vol %, said powder not containing diamond particles having a particle size of less than 1 μm or diamond particles having a particle size of more than 250 μm; and the average value for the differences in in-plane thickness per 50 mm×50 mm is 100 μm or less.
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公开(公告)号:US10358704B2
公开(公告)日:2019-07-23
申请号:US15318138
申请日:2015-07-03
Applicant: DENKA COMPANY LIMITED
Inventor: Yosuke Ishihara , Takeshi Miyakawa , Shinya Narita
Abstract: A composite is obtained by press-molding a mixed powder comprising 20-50 vol % of a metal powder and 50-80 vol % of a diamond powder for which a first peak in a volumetric distribution of particle size lies at 5-25 μm, and a second peak lies at 55-195 μm, and a ratio between the area of a volumetric distribution of particle sizes of 1-35 μm and the area of a volumetric distribution of particle sizes of 45-205 μm is from 1:9 to 4:6, thereby obtaining a composite having a high thermal conductivity and a coefficient of thermal expansion close to that of semiconductor devices, which is easy to mold into a prescribed shape.
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公开(公告)号:US10541189B2
公开(公告)日:2020-01-21
申请号:US16474690
申请日:2017-11-24
Applicant: DENKA COMPANY LIMITED
Inventor: Yosuke Ishihara , Takeshi Miyakawa , Hiroaki Ota , Hideo Tsukamoto
IPC: H01L23/373 , C23C18/32 , C25D7/12 , C22C26/00
Abstract: A sheet-shaped aluminum-diamond composite containing a prescribed amount of a diamond powder wherein a first and second peak in a volumetric distribution of particle sizes occurs at 5-25 μm and 55-195 μm, and a ratio between an area of a volumetric distribution of particle sizes of 1-35 μm and 45-205 μm is from 1:9 to 4:6, the composite including an aluminum-containing metal as the balance, wherein the composite is covered, on both main surfaces, with a surface layer having prescribed film thicknesses and containing 80 vol % or more of an aluminum-containing metal, two or more Ni-containing layers are formed on at least the surface layer, the Ni-containing layers being such that a first and second layer from the surface layer side are amorphous Ni alloy layers having prescribed thicknesses, and an Au layer having a prescribed thickness is formed as an outermost layer.
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公开(公告)号:US10539379B2
公开(公告)日:2020-01-21
申请号:US15508187
申请日:2015-09-01
Applicant: DENKA COMPANY LIMITED
Inventor: Yosuke Ishihara , Takeshi Miyakawa , Kazunori Koyanagi
IPC: B22F7/02 , F28F21/02 , C22C26/00 , C22C47/12 , H01L23/373 , C22C21/02 , F28F21/08 , H01L21/48 , B22F7/06 , C25D5/12 , C22C49/06 , C25D5/44 , C23C18/32 , C23C18/42
Abstract: A heat dissipation component for a semiconductor element includes: a composite part containing 50-80 vol % diamond powder with the remainder having metal including aluminum, the diamond powder having a particle diameter volume distribution first peak at 5-25 μm and a second peak at 55-195 μm. A ratio between a volume distribution area at particle diameters of 1-35 μm and a volume distribution area at particle diameters of 45-205 μm is 1:9 to 4:6; surface layers on both composite part principal surfaces, each of the surface layers containing 80 vol % or more metal including aluminum and having a film thickness of 0.03-0.2 mm; and a crystalline Ni layer and an Au layer on at least one of the surface layers, the crystalline Ni layer having a film thickness of 0.5-6.5 μm, and the Au layer having a film thickness of 0.05 μm or larger.
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公开(公告)号:US11912489B2
公开(公告)日:2024-02-27
申请号:US17292473
申请日:2019-11-06
Applicant: DENKA COMPANY LIMITED
Inventor: Hiroaki Ota , Yosuke Ishihara , Daisuke Goto
CPC classification number: B65D81/268 , B65D57/004 , B65D81/203
Abstract: A plurality of heat dissipation substrates stacked on each other, intermediate sheets disposed under a lowermost heat dissipation substrate, on an uppermost heat dissipation substrate, and between heat dissipation substrates adjacent to each other, a drying agent disposed over or under the plurality of heat dissipation substrates, and a bag that seals the plurality of heat dissipation substrates, the plurality of intermediate sheets, and the drying agent.
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公开(公告)号:US11903168B2
公开(公告)日:2024-02-13
申请号:US17298169
申请日:2019-11-19
Applicant: DENKA COMPANY LIMITED
Inventor: Yosuke Ishihara , Daisuke Goto
IPC: H05K7/20
CPC classification number: H05K7/2039 , H05K7/20854
Abstract: A substantially rectangular flat heat dissipation member includes: a composite portion where silicon carbide having voids is impregnated with metal; and a metal portion that is different from the composite portion. Here, a proportion of a volume of the metal portion to a total volume of the heat dissipation member is 2.9% or higher and 12% or lower. In addition, when a length of a diagonal line of the rectangular flat heat dissipation member is represented by L, in a top view where one main surface of the heat dissipation member is a top surface, 40% or higher of a total volume of the metal portion is present in a region D within a distance of L/6 from an apex of any one of four corners of the heat dissipation member. Further, a hole penetrates the metal portion in the region D.
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公开(公告)号:US11682604B2
公开(公告)日:2023-06-20
申请号:US16822225
申请日:2020-03-18
Applicant: DENKA COMPANY LIMITED
Inventor: Daisuke Goto , Takeshi Miyakawa , Yosuke Ishihara
IPC: H01L23/373 , H01L23/14 , H01L23/12 , H01L23/36 , C22F1/04 , H01L21/48 , H01L23/367
CPC classification number: H01L23/3733 , C22F1/04 , H01L21/4878 , H01L23/12 , H01L23/14 , H01L23/36 , H01L23/367 , H01L2924/0002 , H01L2924/0002 , H01L2924/00
Abstract: To provide a method for manufacturing a heat dissipation component having excellent heat dissipation properties, in which there is minimal return of warping after the bonding of a circuit board, and to provide a heat dissipation component manufactured using the method. Provided is a method for manufacturing a warped flat-plate-shaped heat dissipation component containing a composite part that comprises silicon carbide and an aluminum alloy, wherein the method for manufacturing the heat dissipation component is characterized in that the heat dissipation component is sandwiched in a concave-convex mold having a surface temperature of at least 450° C. and having a pair of opposing spherical surfaces measuring 7000-30,000 mm in curvature radius, and pressure is applied for 30 seconds or more at a stress of 10 kPa or more such that the temperature of the heat dissipation component reaches at least 450° C.
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公开(公告)号:US10302375B2
公开(公告)日:2019-05-28
申请号:US15305262
申请日:2015-04-23
Applicant: DENKA COMPANY LIMITED
Inventor: Yosuke Ishihara , Takeshi Miyakawa , Hideo Tsukamoto , Shinya Narita
Abstract: An aluminum-diamond composite that exhibits both high thermal conductivity and a coefficient of thermal expansion close to that of semiconductor devices, and that can suppress the occurrence of swelling, etc., of a surface metal layer portion even in actual use under a high load. An aluminum-diamond composite includes 65-80 vol % of a diamond powder having a roundness of at least 0.94, for which a first peak in a volumetric distribution of grain size lies at 5-25 μm, and a second peak lies at 55-195 μm, and a ratio between the area of the volumetric distribution of grain sizes of 1-35 μm and the area of the volumetric distribution of grain sizes of 45-205 μm is from 1:9 to 4:6; the balance being composed of a metal containing aluminum.
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