A reflective optical element includes a reflective surface comprising a multitude of discrete recessed and non-recessed areas arranged along the reflective surface. The discrete areas are arranged to approximate a desired phase function (typically modulo 2π) and are smaller than an operational wavelength in order to provide a range of phase delays needed to adequately approximate the desired phase function. Effecting at least partial reflow of one or more optical media or reflective materials can smooth the morphology of the reflective surface so as to reduce unwanted diffraction or scattering.