Invention Grant
- Patent Title: Composition for forming organic anti-reflective coating layer suitable for negative tone development
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Application No.: US15609471Application Date: 2017-05-31
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Publication No.: US10539874B2Publication Date: 2020-01-21
- Inventor: Hyo Jung Roh , Ji Hyun Kim , Seung Jin Kim , Hyun Jin Kim
- Applicant: DONGJIN SEMICHEM CO., LTD.
- Applicant Address: KR Incheon
- Assignee: DONGJIN SEMICHEM CO., LTD.
- Current Assignee: DONGJIN SEMICHEM CO., LTD.
- Current Assignee Address: KR Incheon
- Agency: Cantor Colburn LLP
- Priority: KR10-2016-0067944 20160601
- Main IPC: C09D5/00
- IPC: C09D5/00 ; G02B1/111 ; G03F7/09 ; B05D3/02 ; B05D5/00 ; C09D125/18 ; G03F7/038 ; G03F7/16

Abstract:
Provided is a composition for forming an organic anti-reflective coating layer used in a negative tone development, which not only enhance an adhesion to a photoresist while having a high refractive index and a high etch rate but also improve a pattern profile of undercut etc. The composition an isocyanurate compound containing at least one moiety which is represented by Formula 2; a polymer represented by Formula 3 and an organic solvent for dissolving the above-mentioned components.
Public/Granted literature
- US20170351178A1 COMPOSITION FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER SUITABLE FOR NEGATIVE TONE DEVELOPMENT Public/Granted day:2017-12-07
Information query
IPC分类: