Invention Grant
- Patent Title: Fluid handling structure, a lithographic apparatus and a device manufacturing method
-
Application No.: US15537214Application Date: 2015-12-07
-
Publication No.: US10551748B2Publication Date: 2020-02-04
- Inventor: Cornelius Maria Rops , Walter Theodorus Matheus Stals , David Bessems , Giovanni Luca Gattobigio , Victor Manuel Blanco Carballo , Erik Henricus Egidius Catharina Eummelen , Ronald Van Der Ham , Frederik Antonius Van Der Zanden , Wilhelmus Antonius Wernaart
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP14199085 20141219
- International Application: PCT/EP2015/078842 WO 20151207
- International Announcement: WO2016/096508 WO 20160623
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03B27/52

Abstract:
A fluid handling structure for a lithographic apparatus configured to contain immersion fluid to a region, the fluid handling structure having, at a boundary of a space: at least one gas knife opening in a radially outward direction of the space; and at least one gas supply opening in the radially outward direction of the at least gas knife opening relative to the space. The gas knife opening and the gas supply opening both provide substantially pure CO2 gas so as to provide a substantially pure CO2 gas environment adjacent to, and radially outward of, the space.
Public/Granted literature
- US20170363948A1 A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD Public/Granted day:2017-12-21
Information query
IPC分类: