Sample observation apparatus and method for generating observation image of sample
Abstract:
A sample observation apparatus includes a memory and a main controller. The main controller stores a first number of photoelectrons required in a raw image for generating a super-resolution image. The main controller calculates the number of image data sets to be added together for generating the raw image based on the first number of photoelectrons stored in the memory and a predetermined image acquisition condition, acquires multiple sets of image data of the same region of a sample by repeatedly detecting light from the same region based on the calculated number of image data sets, and generates the raw image by adding together the acquired multiple sets of image data of the same region.
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