- Patent Title: Electrostatically actuated torsional resonant sensors and switches
-
Application No.: US15575962Application Date: 2016-06-23
-
Publication No.: US10557827B2Publication Date: 2020-02-11
- Inventor: Mohammad Ibrahim Younis
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builers PLLC
- International Application: PCT/IB2016/053756 WO 20160623
- International Announcement: WO2016/207834 WO 20161229
- Main IPC: G01N29/02
- IPC: G01N29/02 ; G01N29/036 ; H01H59/00 ; G01N29/24 ; H01H35/42

Abstract:
Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular agent having a mass above a predefined level. In various embodiments, the beam structure may be different types of resonant structures that is at least partially coated or layered with a selective material.
Public/Granted literature
- US20180149619A1 ELECTROSTATICALLY ACTUATED TORSIONAL RESONANT SENSORS AND SWITCHES Public/Granted day:2018-05-31
Information query