Invention Grant
- Patent Title: RRAM cells in crossbar array architecture
-
Application No.: US16058374Application Date: 2018-08-08
-
Publication No.: US10559625B1Publication Date: 2020-02-11
- Inventor: Dexin Kong , Takashi Ando , Kangguo Cheng , Juntao Li
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00 ; G06N3/04

Abstract:
A method is presented for forming vertical crossbar resistive random access memory (RRAM) cells. The method includes forming a substantially U-shaped bottom electrode over a substrate, filling the U-shaped bottom electrode with a first conductive material, capping the U-shaped bottom electrode with a dielectric cap, depositing a high-k material, and forming a top electrode such that active areas of the RRAM cells are vertically aligned and the U-shaped bottom electrode is shared between neighboring RRAM cells.
Public/Granted literature
- US20200052037A1 RRAM CELLS IN CROSSBAR ARRAY ARCHITECTURE Public/Granted day:2020-02-13
Information query
IPC分类: