Invention Grant
- Patent Title: Sample stage
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Application No.: US16430257Application Date: 2019-06-03
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Publication No.: US10580613B2Publication Date: 2020-03-03
- Inventor: Gerhardus Bernardus Stamsnijder , Paul Cornelis Maria van den Bos , Ton Antonius Cornelis Henricus Kluijtmans , Sander Richard Marie Stoks , Adrianus Franciscus Johannes Hammen , Karel Diederick van der Mast
- Applicant: Phenom-World Holding B.V.
- Applicant Address: NL Eindhoven
- Assignee: Phenom-World Holding B.V.
- Current Assignee: Phenom-World Holding B.V.
- Current Assignee Address: NL Eindhoven
- Priority: NL2013783 20141112
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/18 ; H01J37/28
Abstract:
Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.
Public/Granted literature
- US20190287756A1 SAMPLE STAGE Public/Granted day:2019-09-19
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