- Patent Title: Method for manufacturing a flat polymer coated electrostatic chuck
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Application No.: US16131215Application Date: 2018-09-14
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Publication No.: US10585358B2Publication Date: 2020-03-10
- Inventor: Mark Francis Krol , John Stephen Peanasky
- Applicant: Corning Incorporated
- Applicant Address: US NY Corning
- Assignee: Corning Incorpotated
- Current Assignee: Corning Incorpotated
- Current Assignee Address: US NY Corning
- Agent Amy T. Lang; John P. McGroarty
- Main IPC: B05D3/02
- IPC: B05D3/02 ; B05D3/12 ; G03F7/20 ; H01L21/687 ; H01L21/683
Abstract:
A process for manufacturing a flat, polymer-coated electrostatic chuck platen involves imposing forces on the chuck to compensate for platen warpage induced during shrinkage of the polymer coating as it is cured.
Public/Granted literature
- US20190086816A1 METHOD FOR MANUFACTURING A FLAT POLYMER COATED ELECTROSTATIC CHUCK Public/Granted day:2019-03-21
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