Invention Grant
- Patent Title: Coating device and coating method
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Application No.: US15488692Application Date: 2017-04-17
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Publication No.: US10590537B2Publication Date: 2020-03-17
- Inventor: Toshiki Miyazaki
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Kyoto-fu
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto-fu
- Agency: Studebaker & Brackett PC
- Priority: JP2016-086881 20160425
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/50 ; C23C16/02 ; H01J37/32 ; H01G4/30 ; H01G4/12 ; H01G13/00 ; H01G4/232 ; B05D5/08 ; B05D1/00

Abstract:
A coating device including a housing case capable of housing therein a plurality of processing targets and configured to coat the plurality of processing targets with a gaseous component by taking gas into the housing case. A rotation body is configured to rotate the housing case. The housing case includes a through-hole for taking gas inside and a stirring plate protruding from an internal wall of the housing case is used to stir the plurality of processing targets.
Public/Granted literature
- US20170306489A1 COATING DEVICE AND COATING METHOD Public/Granted day:2017-10-26
Information query
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