Invention Grant
- Patent Title: Plasma driven particle propagation apparatus and pumping method
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Application No.: US15738634Application Date: 2016-06-21
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Publication No.: US10593515B2Publication Date: 2020-03-17
- Inventor: David Budge
- Applicant: Aurora Labs Limited
- Applicant Address: AU Bibra Lake
- Assignee: Aurora Labs Limited
- Current Assignee: Aurora Labs Limited
- Current Assignee Address: AU Bibra Lake
- Agency: Andrus Intellectual Property Law, LLP
- Priority: AU2015902421 20150623
- International Application: PCT/AU2016/000214 WO 20160621
- International Announcement: WO2016/205857 WO 20161229
- Main IPC: H01J37/301
- IPC: H01J37/301 ; H05H1/54 ; H01J37/305 ; H05H1/24

Abstract:
A charged particle propagation apparatus has a generator including a vacuum chamber with a gun therein for discharging a charged particle beam through a beam exit. A higher pressure region adjoins the vacuum chamber at the beam exit and is maintainable at a pressure greater than a pressure of the vacuum chamber. A plasma interface located at the beam exit includes a plasma channel having at least three electrode plates disposed between its first end and its second end. A control system is adapted to apply a sequence of electrical currents to the electrode plates, which cause at least one plasma to move from the first end to the second end of the plasma channel, thereby pumping down the beam exit, and, in use, the charged particle beam is propagated from the vacuum chamber through the, or each, plasma into the higher pressure region.
Public/Granted literature
- US20180190471A1 Plasma Driven Particle Propagation Apparatus and Pumping Method Public/Granted day:2018-07-05
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