Invention Grant
- Patent Title: Fabricating memory devices with optimized gate oxide thickness
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Application No.: US16397943Application Date: 2019-04-29
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Publication No.: US10600793B2Publication Date: 2020-03-24
- Inventor: Runzi Chang , Winston Lee , Peter Lee
- Applicant: Marvell World Trade Ltd.
- Applicant Address: BB St. Michael
- Assignee: Marvell World Trade Ltd.
- Current Assignee: Marvell World Trade Ltd.
- Current Assignee Address: BB St. Michael
- Main IPC: H01L27/112
- IPC: H01L27/112 ; G11C17/16 ; G11C17/18 ; H01L21/311 ; H01L23/525 ; H01L29/423 ; H01L21/02 ; H01L21/027

Abstract:
The present disclosure describes apparatuses and methods for manufacturing programmable memory devices with optimized gate oxide thickness. In some aspects, lithography masks are used to fabricate oxide gates for programmable memory devices of an integrated-circuit (IC) die that are thinner than oxide gates fabricated for processor core devices of the IC die. In other aspects, lithography masks are used to fabricate oxide gates for the programmable memory devices of the IC die such that they are thicker than the oxide gates fabricated for the processor core devices of the IC die. By so doing, the programmable memory devices can be manufactured with optimized gate oxide thickness that may reduce programming voltage or increase device reliability of the programmable memory devices.
Public/Granted literature
- US20190259768A1 Fabricating Memory Devices with Optimized Gate Oxide Thickness Public/Granted day:2019-08-22
Information query
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