Invention Grant
- Patent Title: N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications
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Application No.: US15661412Application Date: 2017-07-27
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Publication No.: US10647578B2Publication Date: 2020-05-12
- Inventor: Antonio Sanchez , Gennadiy Itov , Manish Khandelwal , Cole Ritter , Peng Zhang , Jean-Marc Girard , Zhiwen Wan , Glenn Kuchenbeiser , David Orban , Sean Kerrigan , Reno Pesaresi , Matthew Damien Stephens , Yang Wang , Guillaume Husson
- Applicant: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude , American Air Liquide, Inc.
- Applicant Address: FR Paris US CA Fremont
- Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude,American Air Liquide, Inc.
- Current Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude,American Air Liquide, Inc.
- Current Assignee Address: FR Paris US CA Fremont
- Agent Allen E. White; Patricia E. McQueeney
- Main IPC: C01B21/087
- IPC: C01B21/087 ; C04B35/589 ; C04B35/597 ; C04B35/14 ; C09D1/00 ; C01B21/082 ; B05D1/02 ; B05D1/00 ; B05D1/18 ; C23C16/24 ; C08G77/62 ; H01L21/02 ; C04B35/571 ; C04B35/56 ; C09D183/16 ; C23C18/12 ; C23C16/455
Abstract:
Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH3)x(SiH2—)y], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.
Public/Granted literature
- US20180072571A1 N-H FREE AND SI-RICH PER-HYDRIDOPOLYSILZANE COMPOSITIONS, THEIR SYNTHESIS, AND APPLICATIONS Public/Granted day:2018-03-15
Information query
