Invention Grant
- Patent Title: Micromechanical structure for an acceleration sensor
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Application No.: US15775219Application Date: 2016-11-14
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Publication No.: US10656173B2Publication Date: 2020-05-19
- Inventor: Johannes Classen , Antoine Puygranier , Denis Gugel , Guenther-Nino-Carlo Ullrich , Markus Linck-Lescanne , Sebastian Guenther , Timm Hoehr
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: North Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3fce21f2
- International Application: PCT/EP2016/077549 WO 20161114
- International Announcement: WO2017/085003 WO 20170526
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B5/00 ; G01P15/08

Abstract:
A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.
Public/Granted literature
- US20180328959A1 MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR Public/Granted day:2018-11-15
Information query
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