Invention Grant
- Patent Title: Three-dimensional infrared imaging of surfaces utilizing laser displacement sensors
-
Application No.: US15418612Application Date: 2017-01-27
-
Publication No.: US10656402B2Publication Date: 2020-05-19
- Inventor: Andrew Ghetler , Richard P. Tella
- Applicant: Agilent Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/06

Abstract:
A scanning apparatus having a stage adapted to hold a specimen to be imaged and to move the specimen in a first direction, and a light source that includes a tunable laser that generates a light beam having an illumination wavelength that varies as a function of an input signal is disclosed. The apparatus includes an imaging system having a scanning assembly that includes a focusing lens that focuses the light beam to a measurement point on the specimen, a first mirror that moves in a second direction relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the stage, and a displacement sensor that measures a distance between the scanning assembly at a mapping point on the specimen, and a light detector that measures an intensity of light leaving the measurement point on the specimen.
Public/Granted literature
- US20190004300A1 Three-Dimensional Infrared Imaging of Surfaces Utilizing Laser Displacement Sensor Public/Granted day:2019-01-03
Information query